Sensorix Satellix

Satellix by Sensorix is a range of plug-and-play sensors for Satellite XT transmitters.

Satellix sensors are designed by the Sensorix team to reliably detect toxic, corrosive and combustible gases used in the semiconductor industry.

What is special about the range of Satellix sensors?

highly customised mechanical sensor adaptation

features EC gas sensors and pellistors for LEL monitoring

compatible with the Satellite XT transmitter

detects over 30 gases used in the semiconductor processes

Sensorix offers Satellix sensors in three product dimensions according to the listed gas types. There are electrochemical sensors: Satellix Standard for most gases and Satellix 4S for SO2, NO, NO2, O2, as well as pellistor sensors: Satellix LEL.
All these Satellix sensor formats have a dedicated socket and a programmed EPROM. Thus, owners of Satellite XT devices have a plug-and-play sensor solution.
With Satellix, Sensorix is offering a broad range of sensors for detecting the hydride gases, such as AsH3, PH3, SiH4, B2H6, and SeH2, as well as for HF, HCl, HBr, Cl2, NH3, and H2, e.g., which are commonly used in semiconductor processes.

Satellix sensors by Sensorix are developed to reliably detect over thirty gases used in semiconductor manufacturing.

Please select a target gas from the list below to explore the sensor types available to you.

AsH3 Arsine	Br2 Bromine	B2H6 Diborane	CH3F Methyl Fluoride	Cl2 Chlorine
ClF3 Chlorine Trifluoride	ClO2 Chlorine Dioxide	CO Carbon Monoxide	COCl2 Phosgene	C4F6 Hexafluorobutadiene
C5F8 Octafluorocyclopentene	F2 Fluorine	GeH4 Germane	HBr Hydrogen Bromide	HCl Hydrogen Chloride
HCN Hydrogen Cyanide	HF Hydrogen Fluoride	HMDS Hexamethyldisilazane	H2 Hydrogen	H2S Hydrogen Sulfide
NF3 Nitrogen Trifluoride	NH3 Ammonia	N2H4 Hydrazine (upon request)	NO Nitric Oxide	NO2 Nitrogen Dioxide
O2 Oxygen	O3 Ozone	PH3 Phosphine	SeH2 Hydrogen Selenide	SF6 Sulfur Hexafluoride
SiH4 Silane	SO2 Sulfur Dioxide	TEOS Tetraethyl Orthosilicate	TMB Trimethyl Borate	1,2-trans DCE 1,2 trans Dichlorerthylene
LEL Lower Explosive Limit