
Sensorix Satellix
Satellix by Sensorix is a range of plug-and-play sensors for Satellite XT transmitters.
Satellix sensors are designed by the Sensorix team to reliably detect toxic, corrosive and combustible gases used in the semiconductor industry.

What is special about the range of Satellix sensors?
highly customised mechanical sensor adaptation
features EC gas sensors and pellistors for LEL monitoring
compatible with the Satellite XT transmitter
detects over 30 gases used in the semiconductor processes
Key information about the Satellix format

The following target gases can be detected with Satellix sensors
Satellix sensors by Sensorix are developed to reliably detect over thirty gases used in semiconductor manufacturing.
Please select a target gas from the list below to explore the sensor types available to you.
AsH3 Arsine | Br2 Bromine | B2H6 Diborane | CH3F Methyl Fluoride | Cl2 Chlorine |
ClF3 Chlorine Trifluoride | ClO2 Chlorine Dioxide | CO Carbon Monoxide | COCl2 Phosgene | C4F6 Hexafluorobutadiene |
C5F8 Octafluorocyclopentene | F2 Fluorine | GeH4 Germane | HBr Hydrogen Bromide | HCl Hydrogen Chloride |
HCN Hydrogen Cyanide | HF Hydrogen Fluoride | HMDS Hexamethyldisilazane | H2 Hydrogen | H2S Hydrogen Sulfide |
NF3 Nitrogen Trifluoride | NH3 Ammonia | N2H4 Hydrazine (upon request) | NO Nitric Oxide | NO2 Nitrogen Dioxide |
O2 Oxygen | O3 Ozone | PH3 Phosphine | SeH2 Hydrogen Selenide | SF6 Sulfur Hexafluoride |
SiH4 Silane | SO2 Sulfur Dioxide | TEOS Tetraethyl Orthosilicate | TMB Trimethyl Borate | 1,2-trans DCE 1,2 trans Dichlorerthylene |
LEL Lower Explosive Limit |