Introducing the Sensorix COF₂ 2 Sensor for Carbonyl Fluoride Gas Detection
The Sensorix COF₂ 2 is now available in our sensor portfolio. This 3-electrode electrochemical sensor delivers reliable COF₂ gas detection for semiconductor manufacturing safety and industrial applications.
What’s new (quick overview)
- New electrochemical COF₂ sensor: Sensorix COF₂ 2 for selective gas detection
- Measurement range: 0–2 ppm with T90 ≤ 120 s response time
- Application focus: Semiconductor manufacturing processes, specialty chemicals, industrial safety
- Sensor sizes: 4S, 7S, Classic, Smart (with EPROM), and Mini, compatible with both portable detectors and fixed detection systems
Why COF₂ Gas Detection Matters
Carbonyl fluoride (COF₂) is a highly toxic gas increasingly used in semiconductor manufacturing processes. Accurate COF₂ gas detection solutions are essential for rapid leak detection and sensitivity to low gas concentrations.
Electrochemical Sensorix COF₂ 2 Sensor: Reliable Carbonyl Fluoride Detection
Sensorix designs and manufactures precise electrochemical gas sensors for industrial safety and semiconductor production. With decades of gas-detection experience, we support OEM manufacturers worldwide with reliable, innovative sensor technology, including COF2 Gas Detection.
Why Choose the Sensorix COF₂ 2?

The Sensorix COF₂ 2 combines proven electrochemical sensor technology with the demanding requirements of semiconductor manufacturing environments. Built for OEM integration, this gas sensor solution delivers:
- Fast response: T90 ≤ 120 s for rapid hazard detection
- Selective measurement: Optimized for detection up to 2 ppm of COF₂ gas concentrations in complex industrial atmospheres
- Temperature range: −20 °C to +40 °C
- Multiple formats: Five form factors ensure compatibility with your detection system architecture as well as customized formats
Integrating COF₂ Gas Detection: From Selection to Deployment
Sensorix supports OEM manufacturers through the entire gas detection solution lifecycle:
- Format selection: Guidance on choosing the right sensor form factor for your device
- Custom integration: Mechanical adaptation for your specific instruments and application requirements
- Technical support: Documentation, calibration protocols, and field support
- Application expertise: Tailored guidance for semiconductor and chemical processes
Next Steps: Deploy Reliable COF₂ Gas Detection
Ready to integrate COF₂ gas detection into your device portfolio? Contact our sales team to discuss your COF₂ gas detection requirements and integration timeline.
Download resources:
Get expert guidance:
- Request an Application Note: applicationsupport@sensorix.com
- Contact Sales: sales@sensorix.com
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